7EC4 IC TECHNOLOGY
  Units    Contents of the subjects
I
INTRODUCTION TO TECHNOLOGIES- Semiconductor Substrate-Crystal
defects, Electronic Grade Silicon, Czochralski Growth, Float Zone Growth,
Characterization & evaluation of Crystals; Wafer Preparation- Silicon Shaping, Etching
and Polishing, Chemical cleaning.
II

DIFFUSION & ION IMPLANTATION- Ficks diffusion Equation in One
Dimension, Atomic model, Analytic Solution of Ficks Law, correction to simple theory,
Diffusion in SiO2. Ion Implantation and Ion Implantation Systems Oxidation. Growth
mechanism and Deal-Grove Model of oxidation, Linear and Parabolic Rate co-efficient,
Structure of SiO2, Oxidation techniques and system, Oxide properties.
III
CHEMICAL VAPOUR DEPOSITION AND LAYER GROWTH- CVD for
deposition of dielectric and polysilicon – a simple CVD system, Chemical equilibrium
and the law of mass action, Introduction to atmospheric CVD of dielectric, low pressure
CVD of dielectric and semiconductor. Epitaxy-Vapour Phase Expitaxy, Defects in
Epitaxial growth, Metal Organic Chemical Vapor Deposition, Molecular beam epitaxy.
IV
PATTERN TRANSFER- Introduction to photo/optical lithography, Contact/
proximity printers, Projection printers, Mask generation, photoresists. Wet etching,
Plasma etching, Reaction ion etching.
V
VLSI PROCESS INTEGRATION- Junction and Oxide Isolation, LOCOS
methods, Trench Isolation, SOI; Metallization, Planarization. Fundamental consideration
for IC Processing, NMOS IC Technology, CMOS IC Technology, Bipolar IC Technology.
Text/References:
• Vlsi Technology, Sze, TMH
• Semiconductor Devices: Modelling And Technology, Nandita Dasgupta, Amitava
Dasgupta, PHI
• Fundamentals Of Semiconductor Fabrication, Gary S. May, S.M.Sze, John Wiley &
Sons
• Semiconductor Devices: Physics And Technology, Simon M. Sze, John Wiley & Sons
• Introduction To System Design Using Integrated Circuits, Sonde, B.S., New Age
International
• Micro-Nanofabricationtechnologies And Applications, Cui, Zheng, Springer